Smart Material Systems and MEMS: Design and Development Methodologies

Smart Material Systems and MEMS: Design and Development Methodologies


proposing unified assurance of the layout and modeling of shrewdpermanent micro- and macrosystems, this ebook addresses fabrication matters and descriptions the demanding situations confronted by means of engineers operating with clever sensors in numerous purposes.

Part I bargains with the elemental options of a regular clever process and its constituent parts. initial fabrication and characterization recommendations are brought earlier than layout rules are mentioned intimately. half III provides a complete account of the modeling of clever structures, clever sensors and actuators. half IV builds upon the basic options to investigate fabrication ideas for silicon-based MEMS in additional detail.

Practicing engineers will enjoy the exact overview of purposes in communications know-how, aerospace, biomedical and mechanical engineering. The ebook offers a vital reference or textbook for graduates following a path in clever sensors, actuators and systems.

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