Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems (Woodhead Publishing Series in Electronic and Optical Materials)

Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems (Woodhead Publishing Series in Electronic and Optical Materials)


built-in circuits, and units fabricated utilizing the innovations built for built-in circuits, have gradually shrunk, extra complicated, and extra strong. the speed of shrinking is incredible – a few parts are actually quite a few dozen atoms vast. This ebook makes an attempt to respond to the questions, “What comes next?” and “How will we get there?”

Nanolithography outlines the current cutting-edge in lithographic strategies, together with optical projection in either deep and severe ultraviolet, electron and ion beams, and imprinting. certain cognizance is paid to comparable concerns, reminiscent of the resists utilized in lithography, the mask (or lack thereof), the metrology wanted for nano-features, modeling, and the restrictions attributable to characteristic area roughness. additionally rising applied sciences are defined, together with the directed meeting of wafer beneficial properties, nanostructures and units, nano-photonics, and nano-fluidics.

This e-book is meant as a advisor to the researcher new to this box, analyzing comparable journals or dealing with the complexities of a technical convention. Its objective is to provide sufficient history info to allow one of these researcher to appreciate, and delight in, new advancements in nanolithography, and to head directly to make advances of his/her own.

  • Outlines the present state-of-the-art in substitute nanolithography applied sciences to be able to focus on the longer term aid in measurement of semiconductor chips to nanoscale dimensions
  • Covers lithographic suggestions, together with optical projection, severe ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography
  • Describes the rising purposes of nanolithography in nanoelectronics, nanophotonics and microfluidics

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